Dopant

Phosphorous/Boron

Diameter

mm

76.5

100

Diameter Tolerance

mm

±0.5

±0.5

Thickness

μm

≧190

≧190

Thickness Tolerance

μm

±10

±10

Total Thickness Variation

μm

≦3

≦3

Surface Roughness Ra

μm

≦2

≦2

Edge Rounding

μm

optional

optional

Resistivity Range

Ohm-cm

0.003~1

1~30

＞30

0.008~1

1~30

＞30

Redial Resistivity Variation

%

20

25

---

20

25

---