Crystal Growth Technique

CZ

Diameter

mm

76/ 100/ 125/ 150

Orientation

100/ 111

Orientation Tolerance

degree

±2

Dopant

Phosphorous/Antimony/Boron

Oxygen Concentration

atoms/cm³

≦20 x 10¹⁷

Carbon Concentration

atoms/cm³

≦10 x 10¹⁶

Resistivity Range

Ohm-cm

0.003~1

1~30

＞30

Radial Resistivity Variation

%

20

25

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Resistivity Range

Ohm-cm

≧0.008

Radial Resistivity Variation

%

20