Crystal/Ingot |
Crystal Growth Technique | CZ |
Diameter | mm | 76/ 100/ 125/ 150 |
Orientation | 100/ 111 |
Orientation Tolerance | degree | ±2 |
Dopant | Phosphorous/Antimony/Boron |
Oxygen Concentration | atoms/cm3 | ≦20 x 1017 |
Carbon Concentration | atoms/cm3 | ≦10 x 1016 |
◎Phosphorous / Boron |
Resistivity Range | Ohm-cm |
0.003~1 | 1~30 |
>30 |
Radial Resistivity Variation | % |
20 | 25 | --- |
◎Antimony |
Resistivity Range | Ohm-cm | ≧0.008 |
Radial Resistivity Variation | % | 20 |