Products | San Chih Semiconductor Co.

Lapped Wafers
Dopant		Phosphorous/Boron
Diameter	mm	76.5			100
Diameter Tolerance	mm	±0.5			±0.5
Thickness	μm	≧190			≧190
Thickness Tolerance	μm	±10			±10
Total Thickness Variation	μm	≦3			≦3
Surface Roughness Ra	μm	≦2			≦2
Edge Rounding	μm	optional			optional
Resistivity Range	Ohm-cm	0.003~1	1~30	＞30	0.008~1	1~30	＞30
Redial Resistivity Variation	%	20	25	---	20	25	---