| Crystal/Ingot |
|---|
| Crystal Growth Technique | CZ |
| Diameter | mm | 76/ 100/ 125/ 150 |
| Orientation | 100/ 111 |
| Orientation Tolerance | degree | ±2 |
| Dopant | Phosphorous/Antimony/Boron |
| Oxygen Concentration | atoms/cm3 | ≦20 x 1017 |
| Carbon Concentration | atoms/cm3 | ≦10 x 1016 |
| ◎Phosphorous / Boron |
| Resistivity Range | Ohm-cm |
0.003~1 | 1~30 |
＞30 |
| Radial Resistivity Variation | % |
20 | 25 | --- |
| ◎Antimony |
| Resistivity Range | Ohm-cm | ≧0.008 |
| Radial Resistivity Variation | % | 20 |