| Lapped Wafers |
| Dopant | Phosphorous/Boron |
| Diameter | mm | 76.5 | 100 |
| Diameter Tolerance | mm | ±0.5 | ±0.5 |
| Thickness | μm | ≧190 | ≧190 |
| Thickness Tolerance | μm | ±10 | ±10 |
| Total Thickness Variation | μm | ≦3 | ≦3 |
| Surface Roughness Ra | μm | ≦2 | ≦2 |
| Edge Rounding | μm | optional | optional |
| Resistivity Range | Ohm-cm |
0.003~1 | 1~30 |
＞30 | 0.008~1 | 1~30 | ＞30 |
| Redial Resistivity Variation | % | 20 | 25 | --- |
20 | 25 | --- |